Manufacturer: Allwin21 Corp. Condition: New Wafer Size: Small~8 inch Type: Stand Alone, Atmospheric Temperature: 100~800°C or 450~1250°C. Long time and Higher temperature processes are available. Pls contact us for detail. Lamp Zones: 10 from Jan. 2022
Gas Lines: 1 ~ 6 lines Options: Integrated solid robotic wafer transfer ; SMIF (Standard Mechanical Interface) load port transfer. Add Double O Ring and/or O2 Sensor/Analyzer for O2 sensitive applications and saving GaAs, InP, GaN, GaInP, SiC and other valuable compound material wafers.